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| PHYS 52601 - Integrated Nanosystems Processes And Devices |
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Associated Term:
Fall 2022
Learning Outcomes: 1. Analyze the photolithography, material deposition, and material etching process techniques for the development of integrated nanosystems. 2. Evaluate the major classes and components of integrated nanosystems. 3. Assemble design methods to integrate atomic/molecular-scale devices into nanosystems for informational, electromechanical, and biotechnology applications. 4. Verify the design of integrated nanosystems through simulations, working prototypes, and characterizations. 5. Design, simulate, and build integrated nanosystems such as electronics, cantilever beams, and micro/nanofluidics devices. 6. Compose a final research paper, a lab design project report and an oral presentation. Required Materials: Technical Requirements: |
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